发明名称 Method for producing a semiconductor device
摘要 In order to produce a semiconductor device of the MIS type having channel doping, the distribution characteristics of the disturbance point density is determined over the depth of the substrate (or of a well) for different quantities, for channel doping of implanted ions. The swing value is calculated from the gate voltage/drain current characteristic on the basis of the distribution characteristic determined. Ions are implanted in the channel with a doping level which is implanted in the substrate in accordance with the disturbance point density in such a manner that the swing value assumes a minimal value or a value which is as low as possible.
申请公布号 DE3900147(A1) 申请公布日期 1989.07.20
申请号 DE19893900147 申请日期 1989.01.04
申请人 SEIKO EPSON CORP., SHINJUKU, TOKIO/TOKYO, JP 发明人 ITO, MITSUAKI, SUWA, NAGANO, JP
分类号 H01L21/336 主分类号 H01L21/336
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