| 摘要 |
PCT No. PCT/US85/00929 Sec. 371 Date Mar. 17, 1987 Sec. 102(e) Date Mar. 17, 1987 PCT Filed May 17, 1985 PCT Pub. No. WO86/06874 PCT Pub. Date Nov. 20, 1986.A charge forming system and apparatus for introducing ion source materials into the ion source vaporizer of an ion implant instrument is disclosed.
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