发明名称 Method and apparatus for creating a photomask for projecting an image.
摘要 <p>The creation of a photomask corresponding to an image is described utilising a planar disc (10) having at least a portion of its surface formed from a photosensitive material. The disc is mounted for rotation. A laser beam source (18) is supported at a spaced relationship with respect to the disc. One or more laser beams (20) from the source are focused on to the disc (10). The laser source is moved radially with respect to the disc, whereby the laser beams scan the surface of the disc. The beams are modulated in accordance with information corresponding to the image to cause the image to be written on to the photosensitive material on the rotating disc by the laser beam.</p>
申请公布号 EP0337812(A2) 申请公布日期 1989.10.18
申请号 EP19890303733 申请日期 1989.04.14
申请人 THE MEAD CORPORATION 发明人 LU, SUN
分类号 G03F1/08;G01D15/14;G02F1/13;G03F7/20;H01L21/027;H01L21/30;H04N1/10;H04N1/23 主分类号 G03F1/08
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