| 摘要 |
<p>This invention relates to a method and apparatus for grinding and pulverization so as to produce fine powder such as silica powder as the raw material of a filler for sealing a semiconductor, for example. A disc is fixed coaxially to the lower end of a screw shaft put into a processing cylinder and the lower surface of the disc is an inverted conical surface. Therefore, wear of a screw is prevented by the disc and centripetal force resulting from the inverted conical surface acts to prevent sway of the screw shaft. If a plurality of screw shafts are disposed in the processing cylinder, the flow of fluid inside the processing cylinder does not become uniform and grinding efficiency can be improved. A partition is disposed between the screw shafts and communication holes are formed on the upper and lower surfaces of each partition so as to minimize short-circuiting between the outlet and inlet of the processing cylinder. Furthermore, if the rotating speed of each screw shaft, the height of each screw and the screw pitch are made different, the flow of fluid inside the processing cylinder becomes more complicated and grinding efficiency can be improved.</p> |
