发明名称 |
Method and apparatus for producing a magnetic recording medium. |
摘要 |
A method for producing a magnetic recording medium, which comprises forming, by sputtering, a thin undercoating layer and a thin cobalt alloy magnetic layer sequentially on a substrate, wherein an intermediate electrode is provided in the vicinity of the target to enclose at least 1/2 of the circumference of the sputter erosion end of the target, and at least one of the undercoating layer and the cobalt alloy magnetic layer is formed under such condition that a positive potential relative to the substrate and the grounded portion of the main body of the layer-forming apparatus, is applied to the intermediate electrode.
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申请公布号 |
EP0350940(A2) |
申请公布日期 |
1990.01.17 |
申请号 |
EP19890112903 |
申请日期 |
1989.07.13 |
申请人 |
MITSUBISHI KASEI CORPORATION |
发明人 |
KOMIZO, KAZUNAGA;ICHIKAWA, MASATOSHI;SAKUMA, TAKESHI;YOKOYAMA, FUMIAKI;YAMAGUCHI, YUKIO |
分类号 |
G11B5/84;G11B5/851 |
主分类号 |
G11B5/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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