发明名称 Method and apparatus for producing a magnetic recording medium.
摘要 A method for producing a magnetic recording medium, which comprises forming, by sputtering, a thin undercoating layer and a thin cobalt alloy magnetic layer sequentially on a substrate, wherein an intermediate electrode is provided in the vicinity of the target to enclose at least 1/2 of the circumference of the sputter erosion end of the target, and at least one of the undercoating layer and the cobalt alloy magnetic layer is formed under such condition that a positive potential relative to the substrate and the grounded portion of the main body of the layer-forming apparatus, is applied to the intermediate electrode.
申请公布号 EP0350940(A2) 申请公布日期 1990.01.17
申请号 EP19890112903 申请日期 1989.07.13
申请人 MITSUBISHI KASEI CORPORATION 发明人 KOMIZO, KAZUNAGA;ICHIKAWA, MASATOSHI;SAKUMA, TAKESHI;YOKOYAMA, FUMIAKI;YAMAGUCHI, YUKIO
分类号 G11B5/84;G11B5/851 主分类号 G11B5/84
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