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发明名称
APPARATUS FOR ALIGNMENT AND CONNECTION OF ELEMENT AND SUBSTRATE
摘要
申请公布号
JPH0228343(A)
申请公布日期
1990.01.30
申请号
JP19880145380
申请日期
1988.06.13
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
HAYASHI TAKESHI;KATSURA KOSUKE;OHIRA FUMIKAZU
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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