Clean room

摘要

There is proposed a clean room which is distinguished by an air supply, favourable in terms of structural expense, to the fine-filter elements 7 in the clean-room ceiling 8 of the actual clean-room cell 6, comprising a supply-air space 27 which is surrounded above the clean-room ceiling by a smooth airtight wall and has a lateral supply-air opening 26 which extends over a side length of the clean room and supplies the previously clean supply air by means of a flow-distribution device 2 in a uniformly distributed manner over the length. The clean room is preferably formed by means of one or more building modules, in which there is integrated in each case a flow-distribution device which, for the region of the building module in question, brings about the uniform impingement of the fine-filter elements. <IMAGE>