| 发明名称 |
Coatings for relatively movable surfaces |
| 摘要 |
A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1. |
| 申请公布号 |
US9487397(B2) |
申请公布日期 |
2016.11.08 |
| 申请号 |
US201514844779 |
申请日期 |
2015.09.03 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
Morrison William Robert;Fisher Mark Christopher;Hanabe Murali;Sivakumar Ganapathy Subramaniam;Jacobs Simon Joshua |
| 分类号 |
H01L21/322;B81C1/00;B81B7/00;H04W4/02;H01L21/02;B81B3/00 |
主分类号 |
H01L21/322 |
| 代理机构 |
|
代理人 |
Davis, Jr. Michael A.;Cimino Frank D. |
| 主权项 |
1. A method of fabricating a microelectromechanical system (MEMS) device comprising:
forming a MEMS component having a surface; and coating at least a portion of the surface with a compound of the formula M(CnF2n+1Or), wherein M comprises a polar head group, and wherein n≧2r. |
| 地址 |
Dallas TX US |
