发明名称 ANALYSER ARRANGEMENT FOR PARTICLE SPECTROMETER
摘要 The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
申请公布号 US2016336166(A1) 申请公布日期 2016.11.17
申请号 US201615221340 申请日期 2016.07.27
申请人 SCIENTA OMICRON AB 发明人 WANNBERG Björn
分类号 H01J49/48 主分类号 H01J49/48
代理机构 代理人
主权项 1. (canceled)
地址 Uppsala SE