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发明名称
FORMATION OF HIGH-MELTING-POINT-METAL MULTILAYER FILM
摘要
申请公布号
JPH02188921(A)
申请公布日期
1990.07.25
申请号
JP19890007863
申请日期
1989.01.18
申请人
SONY CORP
发明人
KOMATSU YUJI
分类号
H01L23/52;H01L21/28;H01L21/285;H01L21/3205;H01L29/43
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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