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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02226775(A)
申请公布日期
1990.09.10
申请号
JP19890046993
申请日期
1989.02.28
申请人
KOMATSU LTD
发明人
TABUCHI TOSHIHIRO;HINO KAZUHIKO
分类号
H01L29/74;H01L21/22;H01L29/80
主分类号
H01L29/74
代理机构
代理人
主权项
地址
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