Mass transfer tool

摘要

Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads.

主权项

1. A mass transfer tool comprising:
an articulating transfer head assembly including an electrostatic voltage source connection, the electrostatic voltage source connection to electrically connect with an array of electrostatic transfer heads, wherein the articulating transfer head assembly includes a mounting surface, the mounting surface to hold a substrate supporting the array of electrostatic transfer heads against the electrostatic voltage source connection; a carrier substrate holder; and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder.