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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0388334(A)
申请公布日期
1991.04.12
申请号
JP19890226097
申请日期
1989.08.30
申请人
NEC CORP
发明人
KUNIMASA KAZUO
分类号
H01L21/3205;H01L21/768;H01L23/522
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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