发明名称 半導体装置および半導体装置設計方法
摘要 Disclosed herein is the semiconductor substrate, wiring patterns and dummy patterns. A margin region is formed around the wiring pattern. The dummy region is further formed around the margin region. The dummy patterns are formed in the dummy region. The dummy patterns are arranged along the extending direction of the dummy region. Margin regions and dummy regions are allocated alternately with respect to the wiring pattern.
申请公布号 JP6054596(B2) 申请公布日期 2016.12.27
申请号 JP20110122292 申请日期 2011.05.31
申请人 ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. 发明人 高田 頼生
分类号 H01L21/3205;H01L21/304;H01L21/768;H01L21/82;H01L21/822;H01L23/522;H01L27/04 主分类号 H01L21/3205
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