摘要 |
<p>A charge-coupled device (100) having a three-dimensional trench structure that achieves a highly effective sensing and storage area in a CCD imager while maintaining a small cell layout area. The trench CCD device includes a plurality of trench electrodes (106, 106', 108, 108') etched in the surface of the device, with surface electrodes (102, 102', 104, 104') in between. The trenches are shaped to facilitate charge transfer along their sidewalls and to maximize trench surface area. <IMAGE></p> |