FILM BASED ON SILICON DIOXIDE AND PRODUCTION THEREOF.
摘要
<p>A film based on silicon dioxide and contg. zirconium etc. Prepd. by reactive DC sputtering. Various multilayered films contg. the film, such as those used for antirefletion coating, alkali barrier film, or achromatic glass can be produced by physical vapour deposition without breaking a vacuum. @(51pp Dwg.No.0/7).</p>
