HEAT TREATMENT DEVICE,申请号JP19890326871-传众专利搜索

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发明名称	HEAT TREATMENT DEVICE
摘要
申请公布号	JPH03187218(A)	申请公布日期	1991.08.15
申请号	JP19890326871	申请日期	1989.12.15
申请人	NEC CORP	发明人	KONO MICHIHISA;TOIDA HIKARI
分类号	H01L21/26	主分类号	H01L21/26
代理机构		代理人
主权项
地址

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