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发明名称
SUBSTRATE TRANSFER DEVICE
摘要
申请公布号
JPH03266500(A)
申请公布日期
1991.11.27
申请号
JP19900065588
申请日期
1990.03.15
申请人
SHARP CORP
发明人
ISHIYAMA TAKESHI
分类号
H05K13/02
主分类号
H05K13/02
代理机构
代理人
主权项
地址
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