SUBSTRATE WASHING TREATMENT APPARATUS,申请号JP19900087068-传众专利搜索

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发明名称	SUBSTRATE WASHING TREATMENT APPARATUS
摘要
申请公布号	JPH03284842(A)	申请公布日期	1991.12.16
申请号	JP19900087068	申请日期	1990.03.30
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	HIRAI NOBUYUKI;TANAKA MASATO;NISHIZAWA HISAO;NIIHARA KAORU;YOSHIOKA HITOSHI
分类号	H01L21/302;H01L21/304	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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