| 摘要 |
<p>In cleaning equipment 30 for cleaning articles to be cleaned 3 such as electric parts, electronic parts, machine parts, optical related parts, resin processed articles, printing screens or the like, cleaning using flammable solvent 11 is made possible, and it is possible to maintain concentration of the cleaning solvent and to prevent the cleaning solvent from being contaminated. Thus, the cleaning is conducted at a low operation cost. For this purpose, any one of steam, steam and nitrogen, and steam and carbon dioxide is supplied to an inlet pass-box and an outlet pass-box for the articles to be cleaned 3. A cleaning chamber 10 and a distillation column 16 are arranged within the cleaning equipment 30. A condenser of the distillation column 16 is connected to the cleaning chamber 10. <IMAGE></p> |
