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发明名称
CYLINDER-BOX
摘要
申请公布号
JPH04145948(A)
申请公布日期
1992.05.19
申请号
JP19900270090
申请日期
1990.10.08
申请人
CLARION CO LTD
发明人
SATO SEIKI;TOKURA KENJI
分类号
C23C16/44;B01L99/00;C23C14/54;C23C16/455;F17C13/08;H01L21/205;H01L21/302;H01L21/3065
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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