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发明名称
CONTROLLING METHOD FOR CONDUCTIVITY TYPE OF THIN FILM CRYSTAL FORMED BY MOLECULAR BEAM EPITAXIAL GROWTH, AND MOLECULAR BEAM EPITAXIAL DEVICE USING THE CONTROLLING METHOD
摘要
申请公布号
JPH04216616(A)
申请公布日期
1992.08.06
申请号
JP19900411554
申请日期
1990.12.17
申请人
EI TEI AARU KOUDENPA TSUUSHIN KENKIYUUSHIYO:KK
发明人
SHIGETA MITSUHIRO;TAKEBE TOSHIHIKO;YAMAMOTO TEIJI;FUJII MOTOTADA;KOBAYASHI KIKUO
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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