Measuring roughness and shape deviation of technical surfaces - using reflection principle and comparison of recorded intensity distribution with patterns obtained over optical paths with statistical evaluation

摘要

The method involves making use of the reflection principle and the resulting intensity distributions. A light source (LQ) is directed towards the surface (TO) at a define angle (a). The resulting intensity distribution of reflected and scattered light is detected by one or more photosensitive receivers (FD) and recorded. The recorded values are processed (AE) and compared with intensity patterns obtained via one or more optical paths of different lengths. The position and/or degree of surface roughness and/or the average inclination angle of the rough parts are statistically evaluated. ADVANTAGE - Improved qualitative and quantitative detection of different degrees of roughness of surfaces in presence of surface shape errors.