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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04291915(A)
申请公布日期
1992.10.16
申请号
JP19910057290
申请日期
1991.03.20
申请人
FUJITSU LTD
发明人
KOBAYASHI TORU
分类号
H01L21/30;H01L21/027;H01L21/302;H01L21/3065
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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