Scanning head for coordinate measuring appts. for scanning workpiece - has exchangeable scanning pin freely movable simultaneously in coordinate directions X and Y in guides for determining direction and size of deflection at workpiece

摘要

The scanning pin (9) works in conjunction with displacement pick-ups, for determining the direction and the size of the deflection and is acted on by restoring forces for taking up the coordinate zero position. The guides in the X and Y coordinates are formed by slide elements. The slide elements (11,14) are arranged in corresp. recesses in discs, plates or similar, movable at 90 deg. to each other, which lie over each other in the Z coordinate. The slide elements work in conjunction with teh scanning pin mounting (18), and also a deflection mechanism is provided for the Z coordinate. The slide elements (11,14) in their end sections assigned to the X and Y coordinates movement direction are acted upon by gaseous or hydraulic pressure or by suction pressure. ADVANTAGE - Following deflection of scanning pin and corresp. return from workpiece to coordinate zero position is achieved at once, and in rest position is held reliably at end stop without further movement or vibration.