| 摘要 |
<p>A device for electric arc evaporation of metals comprises a cathode (3) consisting of a plate extended within a plane along two coordinates. In a particular case the plate of the cathode (3) consists of a comb (15). Main current leads (5, 6) are connected to the opposite sections (7, 8) of the comb (15), whereas additional current leads (33, 34, 35, 36, 37, 38) are connected to the free ends (39, 40, 41, 42, 43, 44) of the teeth (16, 17, 18, 19, 20, 21) of the comb (15). All the current leads (5, 6, 33, 34, 35, 36, 37, 38) are connected through individually controlled switches (9, 10, 45, 46, 47, 48, 49, 50), to a current source (2) and to a control unit (11) electrically connected to a means (12) for control of the position of the cathode spot (13) on the evaporation surface (4) of the comb (15) of the cathode (3). The means (12) is located in the immediate proximity to the evaporation surface (4) of the comb (15) of the cathode (3) and consists, in a particular case, of two extended electroconductive elements (54, 55). The element (55) is mounted along the base (30) of the comb (15) of one coordinate, whereas the element (54) is mounted along the free ends (39, 40, 41, 42, 43, 44, 31) of the teeth (16, 17, 18, 19, 20, 21, 22) of the comb (15) of the cathode (3) of the other coordinate.</p> |
