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发明名称
VAPOR EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPH04367238(A)
申请公布日期
1992.12.18
申请号
JP19910142854
申请日期
1991.06.14
申请人
FUJITSU LTD
发明人
NISHIJIMA YOSHITO;SAWADA AKIRA
分类号
C30B25/14;C30B25/16;H01L21/365
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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