Fabrication of polycrystalline free-standing diamond films

摘要

Method of fabricating free-standing diamond films by depositing and adhering polycrystalline diamond by hot filament chemical vapor deposition (1-100 Torr, filament temperature equal to or greater than 1900 DEG C., substrate temperature of 650 DEG -950 DEG C.) onto a substrate meltable at a temperature slightly in excess of the deposition temperature; and (b) prior to cooling said polycrystalline diamond particles, increasing (50 DEG -300 DEG C.) the substrate temperature to melt at least a portion thereof while permitting such melt to emigrate from the diamond films.