发明名称 METHOD OF GRAPHENE ATOMIC LAYER ETCHING GRAPHENE MANUFACTURING
摘要 Disclosed in the present invention is a producing method of graphene where a graphene atomic layer is etched, comprising the following steps of: having a self-assembled monolayer (SAM) mask on a graphene surface having at least one layer; and etching graphene having at least one layer by radiating, with energy source, graphene having at least one layer in which the SAM mask is provided.
申请公布号 KR20160111050(A) 申请公布日期 2016.09.26
申请号 KR20150035668 申请日期 2015.03.16
申请人 LEE, YOUN TEK 发明人 LEE, YOUN TEK
分类号 C01B31/04 主分类号 C01B31/04
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