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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05218203(A)
申请公布日期
1993.08.27
申请号
JP19910303667
申请日期
1991.11.20
申请人
NEC CORP
发明人
KOIZUMI YUJI
分类号
H01L21/82;H01L21/822;H01L27/04;H01L27/118
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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