| 摘要 |
A semiconductor integrated circuit device of a standard cell system of this invention includes a cell array (121, 122) constituted by linearly arranging a plurality of cells each having a predetermined unit logical function. A Vcc power supply line (141, 142) and a GND power supply line (161, 162) are formed of a first aluminum layer, to supply a power supply voltage to the cells in the cell arrays (121, 122). Power supply buses (281, 282, 301, 302) formed of a second aluminum layer are arranged on both the ends of the Vcc power supply line (141, 142) and the GND power supply line (161, 162) through a via hole (32, 34), in a direction perpendicular to the Vcc power supply line (141, 142) and the GND power supply line (161, 162). A Vcc power supply line (361, 362), and a GND power supply line (381, 382) formed of a third aluminum layer are arranged on the Vcc power supply line (141, 142) and the GND power supply line (161, 162) at a central portion of the cell array (121, 122), through a via hole (40, 42), and extend in the same direction as the Vcc power supply lines (141, 142) and the GND power supply line (161, 162), both mode of the first aluminum layer. Two systems of GND power supply lines (161, 162, 381, 382) allow a decrease in current density. |
