发明名称 THERMAL EVAPORATION IN TWO PLANES
摘要 Vacuum metallizing substrates having both vertical and horizontal surfaces occurs by directing metal from two remote sources by thermal evaporation. One source is connected horizontally below the object to depose metal vertically toward the object to the horizontal surface thereof. The second source is connected vertically to the object to depose metal horizontally toward the object to the vertical surface thereof. A vacuum chamber contains a rotating carousel supporting the objects with the sources located fixedly within the chamber to perform the thermal evaporation.
申请公布号 CA2087151(A1) 申请公布日期 1993.09.25
申请号 CA19932087151 申请日期 1993.01.12
申请人 DAVIDSON TEXTRON INC. 发明人 EISFELLER, RICHARD C.
分类号 C23C14/22;C23C14/14;C23C14/20;C23C14/24;C23C14/50;(IPC1-7):C23C14/26 主分类号 C23C14/22
代理机构 代理人
主权项
地址