| 摘要 |
PURPOSE:To prevent the generation of a resistance component and an unnecessary Josephson junction by composing a superconducting element of a (c)-axis oriented oxide superconducting thin-film, in which the central section of a top face is indented smoothly and which is divided into two superconducting regions in a non- superconducting region, and an extremely thin (c)-axis oriented oxide superconducting thin-film being formed onto the oxide superconducting thin-film and tying both superconducting regions. CONSTITUTION:A (c)-axis oriented Pr1Ba2Cu3O7-y oxide thin-film 20 and a Y1Ba2Cu3 O7-x oxide thin-film 1 are formed continuously onto an MgO substrate 5, and a smoothly recessed section 14 is shaped near the central section of a top face. Ga ions are implanted to the section 14 to form a non-superconducting region 50, and the Y1Ba2Cu3 O7-x oxide superconducting thin-film 1 is divided into a superconducting source region 2 and a superconducting drain region 3. When a (c)-axis oriented Y1Ba2Cu3O7-x oxide superconducting thin-film 11 is formed extending over both regions 2, 3, a section on the non-superconducting region 50 is used as a superconducting channel 10. Lastly, a gate insulating layer 7 and further a gate electrode 4 are shaped onto the channel 10. Superconducting current is made to flow into or out from the superconducting channel 10 efficiently.
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