Semi finished substrate for opto electrical hybrid circuit - has bonded optically transparent substrate and ceramic substrate segments

摘要

A semi-finished substrate product, for opto-electrical hybrid circuits, consists of a composite of one or more optically transparent substrate segments (2) and one or more ceramic substrate segments (1,1'), in which adjacent segments are joined together at a short side to form a plate with at least one flat surface, the optically transparent substrate (2) having one or more integrated optical elements (3,4). Prodn. of the above semi-finished product involves (i) bonding the faces of at least one ceramic substrate body and at least one optically transparent substrate body; (ii) slicing the composite into individual wafers along cutting faces making an angle of more than 2 deg. to the bonded faces so that each wafer has at least one ceramic and at least one optically transparent substrate segment; (iii) finely surface finishing each wafer at least one cut face acting as a functional face; and (iv) producing at least one optical element on the functional face in the region of the optically transparent substrate segment by applying a mask, effecting a partial material modification by mass exchange in the optically transparent material, carrying out a tempering process and then applying a protective layer and opt. an adhesive layer on the functional face. ADVANTAGE - The semi-finished product facilitates incorporation of integrated optical components or functional groups in complex opto-electrical circuits.