Reinrauminsel und Verfahren zur reinraumgerechten Handhabung von in Behältern gelagerten Gegenständen,申请号DE19924210960-传众专利搜索

发明名称	Reinrauminsel und Verfahren zur reinraumgerechten Handhabung von in Behältern gelagerten Gegenständen
摘要	PCT No. PCT/DE93/00274 Sec. 371 Date Jul. 28, 1994 Sec. 102(e) Date Jul. 28, 1994 PCT Filed Apr. 2, 1993 PCT Pub. No. WO93/20580 PCT Pub. Date Oct. 14, 1993Facility and method for the production of objects which require clean-room conditions in manufacture, wherein a clean-room area includes a working area (6) and a cleaning area (8), and the receptacles (12) transported into this working area (6) are cleaned by an ionic current.
申请公布号	DE4210960(C2)	申请公布日期	1994.03.31
申请号	DE19924210960	申请日期	1992.04.02
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	SWOBODA, BRUNO, 55128 MAINZ, DE;SCHWARZE, JUERGEN, 55291 SAULHEIM, DE;WILD, INGO, 55130 MAINZ, DE
分类号	A61J3/00;B25H1/20;B65B31/00;B65G49/00;C12M1/00;F24F3/16;H01L21/00;H01L21/02;H01L21/677;(IPC1-7):F24F7/00;B65G47/22;H05F1/00;H01L21/30;B08B15/00	主分类号	A61J3/00
代理机构		代理人
主权项
地址