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发明名称
AL CONTACT STRUCTURE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH06216064(A)
申请公布日期
1994.08.05
申请号
JP19930021644
申请日期
1993.01.18
申请人
NEC CORP
发明人
MIURA YOSHINAO
分类号
H01L21/28;H01L21/285;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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