Transition metal oxide films and gas sensors thereof

摘要

Thick oriented films are produced from oxides of molybdenum, tungsten or titanium. These films comprise a plurality of single-molecular thickness layers of semi-crystalline oxide having parallel basal planes. The oxides are produced by sintering highly oriented films of the corresponding metallic sulfide at a temperature of 300 DEG -350 DEG C. The film may be deposited on a substrate between electrical contacts to function as a gas sensor for hydrogen.