发明名称 Method and apparatus for in-situ testing of integrated circuit chips.
摘要 <p>A method of testing semiconductor chips is disclosed. The individual semiconductor chips have I/O, power, and ground contacts. In the method of the invention a chip carrier is provided. The chip carrier has contacts corresponding to the contacts on the semiconductor chip. The carrier contacts have dendritic surfaces. The chip contacts are brought into conductive contact with the conductor pads on the chip carrier. Test signal input vectors are applied to the inputs of the semiconductor chip, and output signal vectors are recovered from the semiconductor chip. After testing, the chip may be removed from the substrate. Alternatively, the chip may be bonded through the dendritic conductor pads to the substrate after successful testing. <IMAGE></p>
申请公布号 EP0614089(A2) 申请公布日期 1994.09.07
申请号 EP19940102896 申请日期 1994.02.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BHATT, ANILKUMAR CH.;BUDA, LEO RAYMOND;EDWARDS, ROBERT DOUGLAS;HART, PAUL JOSEPH;INGRAHAM, ANTHONY P.;MARKOVICH, VOYA RISTA;MOLLA, JAYNAL A.;MURPHY, RICHARD GERALD;SAXENMEYER JR. GEORGE J.;WALKER, GEORGE F.;WHALEN, BETTE J.;ZARR, RICHARD S.
分类号 G01R31/28;H01L21/60;H01L21/66;(IPC1-7):G01R31/28;G01R1/04 主分类号 G01R31/28
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