Parallel single substrate marangoni module

摘要

A substrate drying apparatus for drying a width of a surface of a substrate in a liquid. The substrate drying apparatus has a liquid tank containing the liquid. An injection nozzle is coupled to the liquid tank, the injection nozzle having a continuous knife edge injection surface across the width of the surface of the substrate. A drain is coupled to the injection nozzle, the drain having a continuous drain surface substantially parallel to the continuous knife edge injection surface and across the width of the surface of the substrate. The liquid forms a meniscus between the continuous drain surface and the width of the surface of the substrate. The injection nozzle directs a vapor at the meniscus.

主权项

1. A substrate drying apparatus for drying a width of a surface of a substrate in a liquid, the substrate drying apparatus comprising:
a tank configured for containing the liquid; an injection nozzle mechanically directly coupled to the tank, the injection nozzle having a continuous knife edge injection surface across the width of the surface of the substrate; and a drain mechanically directly coupled to the injection nozzle, the drain having a continuous drain surface coextensive with the continuous knife edge injection surface and across the width of the surface of the substrate; wherein, the continuous drain surface is arranged so that the liquid in the tank forms a meniscus between the continuous drain surface and the width of the surface of the substrate, and wherein the injection nozzle is configured so that it directs vapor at the meniscus, and wherein the substrate is in a substantially vertical orientation in the apparatus, and wherein the continuous drain surface is substantially parallel to the continuous knife edge injection surface.