Magnetron plasma apparatus

摘要

A magnetron plasma apparatus boosted by hollow cathode plasma includes at least one electrically connected pair of a first hollow cathode plate and a second hollow cathode plate placed opposite to each other at a separation distance of at least 0.1 mm and having an opening following an outer edge of a sputter erosion zone on a magnetron target so that a magnetron magnetic field forms a perpendicular magnetic component inside a hollow cathode slit between plates and, wherein the plates and are connected to a first electric power generator together with the magnetron target to generate a magnetically enhanced hollow cathode plasma in at least one of a first working gas distributed in the hollow cathode slit and a second working gas admitted outside the slit in contact with a magnetron plasma generated in at least one of the first working gas and the second working gas.

主权项

1. A magnetron plasma apparatus boosted by hollow cathode plasma for plasma processing on a substrate in a reactor, comprising (a) a parallel plate hollow cathode with a slit wherein a hollow cathode effect can be excited, and (b) a magnetron sputtering apparatus with a magnetron target, a first electric power generator for generation of plasma and a magnetic system generating a magnetron magnetic field giving form to an erosion zone on a surface of said magnetron target and spatial shape of a magnetron plasma, wherein:
at least one electrically connected pair of a first hollow cathode plate and a second hollow cathode plate placed opposite to each other at a separation distance of at least 0.1 mm has an opening following an outer edge of a sputter erosion zone on said magnetron target so that said magnetron magnetic field forms a perpendicular magnetic induction component inside a hollow cathode slit between said plates; and said pair of plates is connected to said first electric power generator together with said target to generate a magnetically enhanced hollow cathode plasma in at least one of a first working gas distributed in said hollow cathode slit and a second working gas admitted outside said slit, said magnetically enhanced hollow cathode plasma in contact with a magnetron plasma generated in at least one of said first working gas and said second working gas.