Top opening-closing mechanism and inspection apparatus

摘要

A top opening-closing mechanism for opening and closing a top of a container including a container body and the top includes a rolling element rotatably provided at the top and positioned on the outside of the container body in a planar view, a rail, a jack for lifting the rail, and a top resting table disposed adjacent to the container and mounting the top thereon. When the top is opened, the jack lifts the rail, the rail lifts the rolling element from below, and thereby the top is lifted up from the container body. Then, the rolling element rolls on the rail and the top resting table to move the top from above the container body to the top resting table.

主权项

1. A vacuum magnetic shield container of an electron beam apparatus including a stage configured to hold a sample, the vacuum magnetic shield container comprising:
an inner container including a stainless steel material; and an outer container including a magnetic steel material different from the material of the inner container, disposed to surround the inner container, wherein the inner container holds a vacuum in the container, and the outer container magnetically shields the container, the inner container and the outer container respectively have a lower opening, the lower openings of both containers are closed with a lower plate, the lower plate is brought into direct contact with a lower end of the outer container, and a sealing member is provided between an upper surface of the lower plate and a lower peripheral edge of the inner container.