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发明名称
METHOD OF SEPARATION OF SINGLE-CRYSTAL INGOTS INTO LAMINATIONS
摘要
申请公布号
RU2032248(C1)
申请公布日期
1995.03.27
申请号
SU19925026630
申请日期
1992.01.03
申请人
NAUCHNO-ISSLEDOVATELSKIJ INSTITUT IZMERITELNYKH SISTEM
发明人
PEREVOSHCHIKOV VIKTOR A;SKUPOV VLADIMIR D;SKUPOVA TATYANA N
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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