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发明名称
PROCESS OF MANUFACTURE OF THIN-FILM TRANSISTORS
摘要
申请公布号
RU2035800(C1)
申请公布日期
1995.05.20
申请号
SU19925036928
申请日期
1992.04.13
申请人
MALOE NAUCHNO-PROIZVODSTVENNOE PREDPRIYATIE "ELO"
发明人
VORONKOV EDUARD N;KAZUROV BORIS I;POPOV IGOR A;CHERNOROTOV BORIS P;OGURTSOV OLEG F
分类号
H01L21/26;(IPC1-7):H01L21/26
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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