| 摘要 |
A high resolution, compact size and low cost multi-degree-of-freedom geometric error measurement system for simultaneously measuring four geometric errors, horizontal straightness, vertical straightness, pitch and yaw. The pitch and yaw error measurements are based on a new method of angle measurement in turn based on the internal reflection effect at an air/glass boundary. The method uses a differential detection scheme to largely reduce the inherent non-linearity of the reflectance versus the angle of incidence in internal reflection. With non-linearity reduced, the displacement of the angle of incidence can be determined accurately by measuring the reflectance. The resolution and measurement range are determined by the initial angle of incidence, the polarization state of light, and the number of reflections. Compared with interferometers and autocollimators, this method has the advantage of a simple sensor design for applications ranging from very wide measurement range to extremely high resolution. Apparatus for accomplishing the method comprises a beamsplitter, a pair of critical angle prisms and a pair of photodiodes. Each photodiode measures change in reflectance and with the application of suitable computation means produces an angle measurement of the beam incident to the beamsplitter. The horizontal and vertical straightness are based on a laser alignment technique utilizing a reference beam input through a single-mode fiber beam delivery system. The pointing stability of the beam is thereby significantly improved. As an illustrative example the system is applied to a machine tool slide.
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