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发明名称
PHOTOLITHOGRAPHY PROCESS
摘要
申请公布号
RU2036536(C1)
申请公布日期
1995.05.27
申请号
SU19914910971
申请日期
1991.02.15
申请人
MINSKIJ RADIOTEKHNICHESKIJ INSTITUT
发明人
LYNKOV LEONID MIKHAJLOVICH;SEMENYAKOV LEONID VASILEVICH
分类号
H01L21/312;(IPC1-7):H01L21/312
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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