发明名称 A METHOD OF COMPLIANTLY MOUNTING A PIEZOELECTRIC DEVICE
摘要 A method of compliantly mounting piezoelectric device with a substrate (102). First, outer portions (114, 116) of a piezoelectric element (106) are selectively metallized. Next, one layer of aluminum (138) is selectively dispensed on the piezoelectric element. Third, an uncured conductive compliant material (112, 112') is placed and aligned on a substrate (102). Fourth, the piezoelectric element (106) is placed and aligned on the conductive compliant material, such that upon curing the conductive compliant material forms a compliant mount connecting the outer metallized portions (114, 116) of the piezoelectric element (106) with the substrate (102).
申请公布号 WO9517769(A1) 申请公布日期 1995.06.29
申请号 WO1994US13458 申请日期 1994.11.22
申请人 MOTOROLA, INC. 发明人 ZIMNICKI, CHARLES;ALHAYEK, IYAD
分类号 H01L41/04;H01L41/22;H03H3/007;H03H3/02;H03H9/05;H03H9/09;(IPC1-7):H01L41/22;H01L41/08 主分类号 H01L41/04
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