| 发明名称 |
ROTATING FLOATING MAGNETRON DARK-SPACE SHIELD |
| 摘要 |
A rotatable magnetron cathode apparatus (42) including a rotatable cathode (42) having at least one supported end adapted for attachment to a spindle (40). At least one dark space shield (54) is attached to the cathode at a supported end to rotate therewith, and is electrically floating relative to the cathode.
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| 申请公布号 |
WO9518458(A1) |
申请公布日期 |
1995.07.06 |
| 申请号 |
WO1994US14555 |
申请日期 |
1994.12.29 |
| 申请人 |
VIRATEC THIN FILMS, INC. |
发明人 |
TAYLOR, CLIFFORD, L.;CROWLEY, DANIEL, T. |
| 分类号 |
H01J37/34;(IPC1-7):H01J21/22;C23C14/35 |
主分类号 |
H01J37/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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