发明名称 PHYSICAL QUANTITY SENSOR, METHOD FOR MANUFACTURING PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
摘要 PROBLEM TO BE SOLVED: To provide a physical quantity sensor that exhibits a high accuracy of physical quantity detection and has reduced cost and size, a method for manufacturing the physical quantity sensor, an electronic apparatus, and a moving object.SOLUTION: A physical quantity sensor 1 includes: an IP substrate 2; an acceleration sensor element 4 fixed to the IP substrate 2 with an adhesion layer 101 in between; and a resin part 91 over the acceleration sensor element 4. Further, a surface 40 of the acceleration sensor element 4 which is surrounded by the resin part 91 has a non-adhesion part 401 not adhering to the resin part 91.SELECTED DRAWING: Figure 1
申请公布号 JP2016169951(A) 申请公布日期 2016.09.23
申请号 JP20150047925 申请日期 2015.03.11
申请人 SEIKO EPSON CORP 发明人 KOBAYASHI TOMONAGA
分类号 G01P15/08;G01C19/5769;G01P15/125;G01P15/18;H01L23/12;H01L29/84 主分类号 G01P15/08
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