| 摘要 |
PURPOSE: To provide a new control method for digital micromirror device. CONSTITUTION: For this method for controlling a digital micromirror device 40 so as to decrease mechanical stress, to more prolong the service life of the device, to reduce the generation of positive bit reset and to improve the accuracy of pulse width modulation, a bias voltage 142 impressed to a mirror 50 for decreasing the stress of the device can be dropped after the mirror 50 is locked (latched). After the mirror has been driven to a desired position for preventing the change of the mirror at too early timing, an address electrode bias voltage 140 can be dropped. In order to guarantee the recovery of the mirror 50 to a neutral position in the case of reset, during a reset period 152, a mirror bias voltage 142 can be increased from a ground potential to the almost intermediate voltage of two address voltages. In order to decrease the storage operation of a hinge and to guarantee the rotation of the mirror 50 toward a proper address electrode, the mirror bias voltage 142 is gradually increrased, so that the mirror 50 can be rotated toward the proper address electrode.
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