| 摘要 |
PURPOSE:To effect an elemental analysis of a coating film whose elemental composition is unknown by dispersing soft X rays generated by condensing laser on a target into a line spectrum of each wavelength. CONSTITUTION:Laser plasma soft X rays are generated by condensing laser light from a YAG laser device 1 with a lens 2 and irradiating an iron target 3. The soft X rays pass through a toroidal mirror as a condensing mirror 4 and are dispersed by a spectroscope 6. The dispersed soft X rays are incident on a material 7 to be measured which is formed on a dry plate for soft X rays in soft X-ray detecting means 5. Then, soft X rays which have penetrated the materiel 7 are exposed on the dry plate for them to take photographs of soft X-ray images of the inner structure of the material 7 to be measured. It is a coating film constituted of carbon, nitrogen, oxygen, hydrogen and silicon. The difference in the transmissivities of soft X rays due to different compositions leads to the identification of elements constituting the coating film. |
